The influence of nitrogen on laser doping from phosphorous doped a-SiNx layers
Steinhauser, Bernd, Jäger, Ulrich, Benick, Jan, Chong, Ellen, Lam, Jenny, Steeman, Rob, Rostan, Hannes, Nekarda, Jan, Hermle, Martin, Preu, Ralf, Glunz, Stefan W.Volume:
157
Language:
english
Journal:
Solar Energy Materials and Solar Cells
DOI:
10.1016/j.solmat.2016.05.047
Date:
December, 2016
File:
PDF, 1.04 MB
english, 2016