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Atomistic Model for Ge Condensation under SiGe Oxidation
Ganster, Patrick, Saul, Andrès, Treglia, GuyVolume:
363
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.363.210
Date:
May, 2015
File:
PDF, 437 KB
english, 2015