Etching Characteristics and Mechanisms of Ti-Sb-Te Phase...

Etching Characteristics and Mechanisms of Ti-Sb-Te Phase Change Material in CHF 3 /O 2 /Ar Plasma for Nano-Devices

Wang, Weiwei, Liu, Bo, Jin, Qiuxue, Xia, Yangyang, Wang, Qing, Yao, Dongning, Song, Sannian, Song, Zhitang, Guo, Xiaohui, Zheng, Hao, Feng, Songlin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
5
Year:
2016
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0191609jss
File:
PDF, 670 KB
english, 2016
Conversion to is in progress
Conversion to is failed