Structural, optical and mechanical properties of thin diamond and silicon carbide layers grown by low pressure microwave linear antenna plasma enhanced chemical vapour deposition
Taylor, Andrew, Drahokoupil, Jan, Fekete, Ladislav, Klimša, Ladislav, Kopeček, Jaromír, Purkrt, Adam, Remeš, Zdeněk, Čtvrtlík, Radim, Tomáštík, Jan, Frank, Otakar, Janíček, Petr, Mistrík, Jan, Mortet,Volume:
69
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2016.06.014
Date:
October, 2016
File:
PDF, 1.73 MB
english, 2016