Design and Characterization of Microelectromechanical...

Nanoscience and Nanotechnology Letters 2011 / 04 Vol. 3; Iss. 2

Design and Characterization of Microelectromechanical System Flow Sensors Using Silicon Nanowires

Lou, Liang, Lee, Chengkuo, Xu, Xiangguo, Kotlanka, Rama Krishna, Shao, Lichun, Park, Woo-Tae, Kwong, D. L.
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Volume:
3
Language:
english
Journal:
Nanoscience and Nanotechnology Letters
DOI:
10.1166/nnl.2011.1160
Date:
April, 2011
File:
PDF, 7.16 MB
english, 2011
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