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Estimation of Material Damping Coefficients of AlN for Film Bulk Acoustic Wave Resonator
Nor, N.I.M., Khalid, N., Osman, Rozana A.M., Sauli, Z.Volume:
819
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.819.209
Date:
June, 2015
File:
PDF, 768 KB
english, 2015