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TiN/PECVD-Si3N4/TiN diaphragm-based capacitive-type MEMS acoustic sensor
Lee, J.S., Kim, Y.-G., Lee, S.Q., Lee, J., Yang, W.S., Jeon, J.H., Lee, S.-G.Volume:
52
Language:
english
Journal:
Electronics Letters
DOI:
10.1049/el.2015.3856
Date:
March, 2016
File:
PDF, 497 KB
english, 2016