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[IEEE 2016 IEEE International Conference on Plasma Science (ICOPS) - Banff, AB, Canada (2016.6.19-2016.6.23)] 2016 IEEE International Conference on Plasma Science (ICOPS) - Effct of target poisoning on the growth of interfacial layer during the initial stage of DC magnetron sputtering deposition
Lee, Jin Young, Kang, Woo Seok, Hur, Min, Lee, Jae-Ok, Song, Young-HoonYear:
2016
Language:
english
DOI:
10.1109/PLASMA.2016.7534214
File:
PDF, 98 KB
english, 2016