Effect of an increase in the density of collision cascades...

Semiconductors 2016 / 8 Vol. 50; Iss. 8

Effect of an increase in the density of collision cascades on the efficiency of the generation of primary displacements during the ion bombardment of Si

Karabeshkin, K. V., Karaseov, P. A., Titov, A. I.
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Volume:
50
Language:
english
Journal:
Semiconductors
DOI:
10.1134/s1063782616080145
Date:
August, 2016
File:
PDF, 417 KB
english, 2016
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