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High-rate magnetron sputtering with hot target
Sidelev, Dmitrii V., Bleykher, Galina A., Krivobokov, Valeriy P., Koishybayeva, ZhanumgylLanguage:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2016.06.096
Date:
August, 2016
File:
PDF, 1.14 MB
english, 2016