[IEEE 2016 Conference on Precision Electromagnetic Measurements (CPEM 2016) - Ottawa, ON, Canada (2016.7.10-2016.7.15)] 2016 Conference on Precision Electromagnetic Measurements (CPEM 2016) - Thickness measurements of oxide and carbonaceous layer on a 28 Si sphere by using XPS
Zhang, Lulu, Kuramoto, Naoki, Azuma, Yasushi, Kurokawa, Akira, Fujii, KenichiYear:
2016
Language:
english
DOI:
10.1109/cpem.2016.7540686
File:
PDF, 261 KB
english, 2016