Anisotropic shadow effects with various pattern directions...

Journal of Micro/Nanolithography MEMS and MOEMS 2016 / 08 Vol. 15; Iss. 3

Anisotropic shadow effects with various pattern directions in an anamorphic high numerical aperture system

Kim, In-Seon, Kim, Guk-Jin, Yeung, Michael, Barouch, Eytan, Kim, Seong-Wook, Oh, Hye-Keun
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Volume:
15
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.15.3.033504
Date:
August, 2016
File:
PDF, 2.57 MB
english, 2016
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