Localized in situ cladding annealing for post-fabrication...

Localized in situ cladding annealing for post-fabrication trimming of silicon photonic integrated circuits

Spector, Steven, Knecht, Jeffrey M., Juodawlkis, Paul W.
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Volume:
24
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.24.005996
Date:
March, 2016
File:
PDF, 1.31 MB
english, 2016
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