Localized in situ cladding annealing for post-fabrication trimming of silicon photonic integrated circuits
Spector, Steven, Knecht, Jeffrey M., Juodawlkis, Paul W.Volume:
24
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.24.005996
Date:
March, 2016
File:
PDF, 1.31 MB
english, 2016