A facile synthesis of C60-organosilicon hybrid polymers: Considering their tunable optical properties for spin-on-silicon hardmask materials
Choi, Jin-Kyu, Dao, Tung Duy, Kim, Ye-Seul, Jeong, Hyun-DamVolume:
181
Language:
english
Journal:
Materials Chemistry and Physics
DOI:
10.1016/j.matchemphys.2016.06.057
Date:
September, 2016
File:
PDF, 981 KB
english, 2016