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Etching Silicon with Aqueous Acidic Ozone Solutions: Reactivity Studies and Surface Investigations
Gondek, Christoph, Hanich, Ronny, Honeit, Florian, Lißner, Andreas, Stapf, Andre, Kroke, EdwinLanguage:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/acs.jpcc.6b06332
Date:
August, 2016
File:
PDF, 2.27 MB
english, 2016