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Influence of HF acid catalyst concentration on properties of aerogel low-k thin films
Gaikwad, A S, Gupta, S A, Mahajan, A MVolume:
3
Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/3/8/086403
Date:
August, 2016
File:
PDF, 2.72 MB
english, 2016