[IEEE 2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) - Kyoto, Japan (2016.7.6-2016.7.8)] 2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) - Why high-pressure sputtering must be avoided to deposit a-In-Ga-Zn-O films
Ide, Keisuke, Kikuchi, Mitsuho, Sasase, Masato, Hiramatsu, Hidenori, Kumomi, Hideya, Hosono, Hideo, Kamiya, ToshioYear:
2016
Language:
english
DOI:
10.1109/AM-FPD.2016.7543696
File:
PDF, 2.01 MB
english, 2016