Highly sensitive piezoelectric micromachined ultrasonic...

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Micro & Nano Letters 2016 / 05

Highly sensitive piezoelectric micromachined ultrasonic transducer operated in air

Kobayashi, Takeshi, Lee, Chengkuo, Wang, Tao
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Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2016.0207
Date:
May, 2016
File:
PDF, 460 KB
english, 2016
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