Specific features of doping with antimony during the ion-beam crystallization of silicon
Pashchenko, A. S., Chebotarev, S. N., Lunin, L. S., Irkha, V. A.Volume:
50
Language:
english
Journal:
Semiconductors
DOI:
10.1134/s1063782616040199
Date:
April, 2016
File:
PDF, 1.88 MB
english, 2016