Analytical and electrical modeling of a MEMS thermoelectric microwave power sensor
Han, Juzheng, Liao, XiaopingVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/9/094001
Date:
September, 2016
File:
PDF, 1.43 MB
english, 2016