Quantifying eigenstrain distributions induced by focused...

Materials Letters 2016 / 12 Vol. 185

Quantifying eigenstrain distributions induced by focused ion beam damage in silicon

Korsunsky, Alexander M., Guénolé, Julien, Salvati, Enrico, Sui, Tan, Mousavi, Mahmoud, Prakash, Arun, Bitzek, Erik
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Volume:
185
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2016.08.111
Date:
December, 2016
File:
PDF, 1.10 MB
english, 2016
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