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Fabrication of three-dimensional silicon structure with smooth curved surfaces
Deng, Shengfeng, Zhang, Yulong, Jiang, Shusen, Lu, MiaoVolume:
15
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.15.3.034503
Date:
August, 2016
File:
PDF, 2.63 MB
english, 2016