Study of Triangle-Shaped Defects on Nearly On-Axis 4H-SiC Substrates
Zhou, Ren Wei, Liu, Xue Chao, Guo, Hui Jun, Kong, H.K., Shi, Er WeiVolume:
858
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.858.225
Date:
May, 2016
File:
PDF, 783 KB
english, 2016