Optimization of VLS Growth Process for 4H-SiC P/N Junctions
Sejil, Selsabil, Lazar, Mihai, Cayrel, Frédéric, Carole, Davy, Brylinski, Christian, Planson, Dominique, Ferro, Gabriel, Raynaud, ChristopheVolume:
858
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.858.205
Date:
May, 2016
File:
PDF, 4.04 MB
english, 2016