Low-temperature deposition of nanocrystalline diamond films on silicon nitride substrates using distributed antenna array PECVD system
Baudrillart, Benoît, Bénédic, Fabien, Melouani, Amel S., Oliveira, Filipe J., Silva, Rui F., Achard, JocelynLanguage:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201600221
Date:
July, 2016
File:
PDF, 1.53 MB
english, 2016