Influence of substrate bias on the structure and properties...

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Thin Solid Films 2016 / 8

Influence of substrate bias on the structure and properties of TiCN films deposited by radio-frequency Magnetron sputtering

Saoula, N., Madaoui, N., Tadjine, R., Erasmus, R.M., Shrivastava, S., Comins, J.D.
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.08.047
Date:
August, 2016
File:
PDF, 1.75 MB
english, 2016
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