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Image-Guided Nanopositioning Scheme for SEM
Marturi, Naresh, Tamadazte, Brahim, Dembele, Sounkalo, Piat, NadineYear:
2016
Language:
english
Journal:
IEEE Transactions on Automation Science and Engineering
DOI:
10.1109/tase.2016.2580660
File:
PDF, 8.41 MB
english, 2016