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Fabrication of Micro-Lens Array Obtained by Anisotropic Wet Etching of Silicon
Parvulescu, Catalin, Manea, Elena, Schiopu, Paul, Gavrila, RalucaVolume:
369
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.369.71
Date:
July, 2016
File:
PDF, 1.44 MB
english, 2016