Effect of Remote Oxygen Scavenging on Electrical Properties of Ge-Based Metal–Oxide–Semiconductor Capacitors
Fadida, Sivan, Nyns, Laura, Van Elshocht, Sven, Eizenberg, MosheVolume:
46
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-016-4841-6
Date:
January, 2017
File:
PDF, 1004 KB
english, 2017