Homodyne full-field interferometer for measuring dynamic...

Homodyne full-field interferometer for measuring dynamic surface phenomena in microstructures

Lipiäinen, Lauri, Kokkonen, Kimmo, Kaivola, Matti
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Volume:
88
Language:
english
Journal:
Optics and Lasers in Engineering
DOI:
10.1016/j.optlaseng.2016.08.004
Date:
January, 2017
File:
PDF, 602 KB
english, 2017
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