(Invited) Low-Temperature Microwave-Based Plasma Oxidation...

(Invited) Low-Temperature Microwave-Based Plasma Oxidation of Ge and Oxidation of Silicon Followed by Plasma Nitridation

Lerch, W., Schick, T., Sacher, N., Kegel, W., Niess, J., Czernohorsky, M., Riedel, S.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
72
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/07204.0101ecst
Date:
May, 2016
File:
PDF, 566 KB
english, 2016
Conversion to is in progress
Conversion to is failed