Piezoelectric 3D actuator for micro-manipulation based on [011]-poled PMN-PT single crystal
Ciubotariu, Dragos Adrian, Ivan, Ioan Alexandru, Clévy, Cédric, Lutz, PhilippeLanguage:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2016.08.017
Date:
August, 2016
File:
PDF, 810 KB
english, 2016