The study of influence of working pressure on mode conversion of argon radio-frequency inductively coupled plasma
Zhang, Youpeng, Chen, Junfang, Song, Congzheng, Wang, Yan, Xiong, WenwenVolume:
132
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2016.07.022
Date:
October, 2016
File:
PDF, 1.15 MB
english, 2016