Characterization of embedded microheater of a CMOS–MEMS...

Microelectronics Journal 2016 / 09 Vol. 55

Characterization of embedded microheater of a CMOS–MEMS gravimetric sensor device

Dennis, John Ojur, Rabih, Almur A.S., Md Khir, Mohd Haris, Ahmed, Abdelaziz Yousif, Ahmed, Mawahib Gafare, Mian, Muhammad Umer
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Volume:
55
Language:
english
Journal:
Microelectronics Journal
DOI:
10.1016/j.mejo.2016.07.005
Date:
September, 2016
File:
PDF, 3.13 MB
english, 2016
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