Area-selective atomic layer deposition of platinum using...

Nanotechnology 2016 / 10 Vol. 27; Iss. 40

Area-selective atomic layer deposition of platinum using photosensitive polyimide

Vervuurt, René H J, Sharma, Akhil, Jiao, Yuqing, Kessels, Wilhelmus (Erwin) M M, Bol, Ageeth A
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Volume:
27
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/27/40/405302
Date:
October, 2016
File:
PDF, 1.73 MB
english, 2016
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