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Feasibility study on 3-D shape analysis of high-aspect-ratio features using through-focus scanning optical microscopy
Attota, Ravi Kiran, Weck, Peter, Kramar, John A., Bunday, Benjamin, Vartanian, VictorVolume:
24
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.24.016574
Date:
July, 2016
File:
PDF, 4.72 MB
english, 2016