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Microstructure and piezoelectric properties of reactively sputtered highly C-axis ScxAl1-xN thin films on diamond-like carbon/Si substrate
Liauh, Woan Jwu, Wu, Sean, Huang, Jow-Lay, Lii, Ding-Fwu, Lin, Zhi-Xun, Yeh, Wen-KuanLanguage:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2016.06.097
Date:
August, 2016
File:
PDF, 3.57 MB
english, 2016