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Impact of asymmetric dual-k spacer in the underlap regions of sub 20 nm NMOSFET with Gate Stack
Chakraborty, Shramana, Dasgupta, Arpan, Das, Rahul, Kundu, Atanu, Sarkar, Chandan K.Language:
english
Journal:
Superlattices and Microstructures
DOI:
10.1016/j.spmi.2016.09.008
Date:
September, 2016
File:
PDF, 1.62 MB
english, 2016