Sensitivity Jump of Micro Accelerometer Induced by Micro-fabrication Defects of Micro Folded Beams
Zhou, Wu, Chen, Lili, Yu, Huijun, Peng, Bei, Chen, YuVolume:
16
Language:
english
Journal:
Measurement Science Review
DOI:
10.1515/msr-2016-0028
Date:
January, 2016
File:
PDF, 4.51 MB
english, 2016