Plasma engineering of silicon quantum dots and their properties through energy deposition and chemistry
Sahu, Bibhuti Bhusan, Yin, Yongyi, Gauter, Sven, Han, Jeon Geon, Kersten, HolgerYear:
2016
Language:
english
Journal:
Phys. Chem. Chem. Phys.
DOI:
10.1039/C6CP05647D
File:
PDF, 4.63 MB
english, 2016