The effect of amorphous silicon capping on titanium during...

Journal of Materials Science 1990 / 01 Vol. 25; Iss. 1

The effect of amorphous silicon capping on titanium during TiSi2formation by RTA

S. W. Kang, S. C. Park, S. Chun
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Volume:
25
Language:
english
Pages:
5
DOI:
10.1007/bf00544191
Date:
January, 1990
File:
PDF, 404 KB
english, 1990
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