Advances in 3x150 mm Hot-Wall and 6x150 mm Warm-Wall SiC...

Materials Science Forum 2016 / 5 Vol. 858

Advances in 3x150 mm Hot-Wall and 6x150 mm Warm-Wall SiC Epitaxy for 10kV-Class Power Devices

O'Loughlin, Michael, Burk Jr., Albert, Tsvetkov, Denis, Ustin, Scott, Palmour, John W.
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Volume:
858
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.858.167
Date:
May, 2016
File:
PDF, 381 KB
english, 2016
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