Three-point-support method based on position determination of supports and wafers to eliminate gravity-induced deflection of wafers
Liu, Haijun, Zhu, Xianglong, Kang, Renke, Dong, Zhigang, Chen, XiuyiVolume:
46
Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2016.06.003
Date:
October, 2016
File:
PDF, 2.68 MB
english, 2016