Segmentation Models for the Duration of Expected Preventive...

IEEE Transactions on Semiconductor Manufacturing 2016 / 8 Vol. 29; Iss. 3

Segmentation Models for the Duration of Expected Preventive Maintenance in Semiconductor Fabs

Regev, Itai, Benson-Karhi, Diamanta
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Volume:
29
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2016.2583485
Date:
August, 2016
File:
PDF, 782 KB
english, 2016
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