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Chemical etching of (100) GaAs in the (NH4)2Cr2O7-H2SO4-N H4Cl-H2O system
Irena Barycka, Irena ZubelVolume:
21
Language:
english
Pages:
6
DOI:
10.1007/bf00547963
Date:
June, 1986
File:
PDF, 489 KB
english, 1986