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Synthesis of Narrow Molecular Weight Distribution Copolymers for ArF Photoresist Materials by Nitroxide Mediated Polymerization
Wang, Zi Jun, Wylie, Kevin, Marić, MilanLanguage:
english
Journal:
Macromolecular Reaction Engineering
DOI:
10.1002/mren.201600029
Date:
August, 2016
File:
PDF, 1.47 MB
english, 2016