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Study on nano-pores enlargement during Ag-assisted electroless etching of diamond wire sawn polycrystalline silicon wafers
Niu, Yu-Chao, Liu, Hsing-Tsun, Liu, Xiang-Ju, Jiang, Yan-Sen, Ren, Xian-Kun, Cai, Pei, Zhai, Tong-GuangVolume:
56
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2016.08.004
Date:
December, 2016
File:
PDF, 1.96 MB
english, 2016