Role of a polysilicon layer in the reduction of lattice defects associated with phosphorus predeposition in silicon
A. Armigliato, M. Servidori, S. Solmi, A. ZaniVolume:
15
Language:
english
Pages:
7
DOI:
10.1007/bf00551800
Date:
May, 1980
File:
PDF, 1.43 MB
english, 1980