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The use of “actinometer” gases in optical diagnostics of plasma etching mixtures: SF6-O2
Riccardo d'Agostino, Vincenzo Colaprico, Francesco CramarossaVolume:
1
Language:
english
Pages:
11
DOI:
10.1007/bf00565993
Date:
December, 1981
File:
PDF, 458 KB
english, 1981