Structural and morphological characterization of Al2O3...

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Thin Solid Films 2016 / 9

Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition

Sampath, Sridhar, Maydannik, Philipp, Ivanova, Tatiana, Homola, Tomáš, Sillanpää, Mika, Nagumothu, Rameshbabu, Alagan, Viswanathan
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.09.026
Date:
September, 2016
File:
PDF, 1.59 MB
english, 2016
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